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  • Aluminum Nitride (AlN)

Aluminum nitride HTCC ceramic heating plate and substrate

Green Sheet Preparation: AlN ceramic powder is mixed with a binder and solvent to form a slurry.

Aluminum nitride HTCC ceramic heating plate and substrate

    The slurry is then cast onto a flat surface and dried to form green sheets. The green sheets act as the base material for the heating plates and substrates.

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  • Material Selection: Choose high-quality AlN ceramic material suitable for HTCC heating plates and substrates. Consider factors such as purity, crystal structure, thermal conductivity, dielectric properties, and coefficient of thermal expansion (CTE) based on the specific requirements of the application.
  • Circuit Design and Printing: If the heating plate or substrate requires embedded circuitry, design the circuit pattern using computer-aided design (CAD) software. The circuit pattern is then printed onto the green sheet using thick film printing techniques like screen printing. The printed circuit pattern typically consists of conductive and resistive materials.
  • Layer Stacking and Lamination: Multiple green sheets with or without circuit patterns are stacked together to form a multilayer structure. The layers are aligned, pressed together, and laminated to create a solid structure. During the lamination process, the binder in the green sheets is burned off.
  • Firing: The laminated structure is fired in a high-temperature furnace. This firing process removes any remaining organic materials and sinters the AlN ceramic, promoting densification and bonding between the layers. The firing temperature and duration are carefully controlled to ensure proper sintering without causing deformation or cracking.
  • Machining and Finishing: After firing, the AlN HTCC heating plate or substrate is machined to achieve the desired dimensions, surface smoothness, and flatness. CNC milling, drilling, grinding, or diamond machining techniques may be used. Surface treatments such as polishing or coating may also be applied for specific requirements.
  • Inspection and Quality Control: Thoroughly inspect the machined AlN HTCC heating plate or substrate to ensure it meets the required specifications. Dimensional measurements, electrical insulation testing, thermal performance evaluation, and visual inspection are typically performed to verify the quality and performance of the product.
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